Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7718544 | Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient | Naoto Tsuji, Kiyohiro Matsushita, Satoshi Takahashi | 2010-05-18 |