Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482418 | Substrate processing method and apparatus | Toshihisa Nozawa, Ryu Nakano | 2022-10-25 |
| D851633 | Microphone with built-in speaker | Daisuke Higashihara | 2019-06-18 |
| 9899291 | Method for protecting layer by forming hydrocarbon-based extremely thin film | Richika Kato, Seiji Okuro, Kunitoshi Namba, Yuya Nonaka | 2018-02-20 |
| 9478414 | Method for hydrophobization of surface of silicon-containing film by ALD | Akiko Kobayashi, Dai Ishikawa, Kiyohiro Matsushita | 2016-10-25 |
| 9190263 | Method for forming SiOCH film using organoaminosilane annealing | Dai Ishikawa, Kiyohiro Matsushita, Shintaro Ueda, Hirofumi Arai | 2015-11-17 |
| 9117657 | Method for filling recesses using pre-treatment with hydrocarbon-containing gas | Shintaro Ueda | 2015-08-25 |
| 9029272 | Method for treating SiOCH film with hydrogen plasma | Shintaro Ueda, Dai Ishikawa, Kiyohiro Matsushita | 2015-05-12 |
| 8551892 | Method for reducing dielectric constant of film using direct plasma of hydrogen | — | 2013-10-08 |
| 7884016 | Liner materials and related processes for 3-D integration | Hessel Sprey | 2011-02-08 |
| 7524908 | Copolymerized high polymer film and method of manufacturing the same | Jun Kawahara, Keizo Kinoshita, Nobutaka Kunimi | 2009-04-28 |
| 7439315 | Polymer film and method for producing the same | Nobutaka Kunimi, Jun Kawahara, Keizo Kinoshita | 2008-10-21 |
| 7220810 | Polymer film and method for producing the same | Nobutaka Kunimi, Jun Kawahara, Keizo Kinoshita | 2007-05-22 |
| 6261974 | Growth method of a polymer film | Jun Kawahara, Yoshihiro Hayashi, Mikio Shimizu, Tomohisa Nishikawa | 2001-07-17 |