Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088002 | Substrate rack and a substrate processing system and method | Dieter Pierreux, Werner Knaepen, Bert Jongbloed, Cornelis Thaddeus Herbschleb | 2021-08-10 |
| 10699899 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2020-06-30 |
| 10056249 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2018-08-21 |
| 9552979 | Cyclic aluminum nitride deposition in a batch reactor | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Peter Zagwijn, Cornelius A. van der Jeugd +4 more | 2017-01-24 |
| 9514934 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2016-12-06 |
| 9006112 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2015-04-14 |
| 8652573 | Method of CVD-depositing a film having a substantially uniform film thickness | Maarten Stokhof, Tatsuya Yoshimi, Bert Jongbloed, Noureddine Adjeroud | 2014-02-18 |
| 7981791 | Thin films | Suvi Haukka, Ivo Raaijmakers, Wei Li, Juhana Kostamo, Christiaan J. Werkhoven | 2011-07-19 |
| 7884016 | Liner materials and related processes for 3-D integration | Akinori Nakano | 2011-02-08 |
| 7498242 | Plasma pre-treating surfaces for atomic layer deposition | Devendra Kumar, Kamal Kishore Goundar, Nathanael R. C. Kemeling, Hideaki Fukuda, Maarten Stokhof | 2009-03-03 |
| 7419903 | Thin films | Suvi Haukka, Ivo Raaijmakers, Wei Li, Juhana Kostamo | 2008-09-02 |
| 6884317 | Method and installation for etching a substrate | Arjen Storm, Jan Willem Maes | 2005-04-26 |
| 6878628 | In situ reduction of copper oxide prior to silicon carbide deposition | Auguste Sophie, Pekka Soininen, Kai-Erik Elers | 2005-04-12 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers +3 more | 2004-07-06 |
| 6387827 | Method for growing thin silicon oxides on a silicon substrate using chlorine precursors | Paul Mertens, Michael J. McGeary, Karine Kenis, Marc Schaekers, Marc Heyns | 2002-05-14 |