Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702745 | Nozzle and nozzle head | Mika Jauhiainen | 2023-07-18 |
| 11214866 | Nozzle head and apparatus | Mika Jauhiainen | 2022-01-04 |
| 11041243 | Coating precursor nozzle and a nozzle head | — | 2021-06-22 |
| 10590536 | Apparatus, method and reaction chamber | Mikko Soderlund, Jarmo Maula | 2020-03-17 |
| 10385450 | Method of coating a substrate and an apparatus | Mikko Soderlund, Paavo Timonen | 2019-08-20 |
| 10280508 | Nozzle head and apparatus for coating substrate surface | Olli Pekonen | 2019-05-07 |
| 10167551 | Apparatus, method and reaction chamber | Mikko Soderlund, Jarmo Maula | 2019-01-01 |
| 10023957 | Apparatus and method for processing substrate | Mika Jauhiainen | 2018-07-17 |
| 9803281 | Nozzle head and apparatus | Olli Pekonen | 2017-10-31 |
| 9783887 | Apparatus and method | Sami Sneck | 2017-10-10 |
| 9683291 | Apparatus for processing surface of substrate and nozzle head | Robin Enholm, Leif Keto | 2017-06-20 |
| 8883258 | Protective coating of silver | Milja Makela, Sami Sneck | 2014-11-11 |
| 7971861 | Safe liquid source containers | — | 2011-07-05 |
| 7833352 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Leif Keto | 2010-11-16 |
| 7497420 | Safe liquid source containers | — | 2009-03-03 |
| 7276774 | Trench isolation structures for integrated circuits | Ivo Raaijmakers, Ernst H. A. Granneman | 2007-10-02 |
| 7215658 | Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network | Ari Alastalo, Mika Kasslin | 2007-05-08 |
| 7156380 | Safe liquid source containers | — | 2007-01-02 |
| 7037372 | Method of growing a thin film onto a substrate | Sven Lindfors | 2006-05-02 |
| 7018478 | Method of growing a thin film onto a substrate | Sven Lindfors | 2006-03-28 |
| 6881263 | Method of growing a thin film onto a substrate | Sven Lindfors | 2005-04-19 |
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Ivo Raaijmakers, Ernst H. A. Granneman | 2005-03-01 |
| 6783590 | Method of growing a thin film onto a substrate | Sven Lindfors | 2004-08-31 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Ivo Raaijmakers, Ernst H. A. Granneman, Suvi Haukka | 2004-03-02 |