Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513776 | Method for coating a substrate | — | 2019-12-24 |
| 10273579 | Apparatus for processing two or more substrates in a batch process | — | 2019-04-30 |
| 10214813 | Apparatus and method for providing a coating to a surface of a substrate | — | 2019-02-26 |
| 9683291 | Apparatus for processing surface of substrate and nozzle head | Robin Enholm, Pekka Soininen | 2017-06-20 |
| 7833352 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Pekka Soininen | 2010-11-16 |
| 6579374 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Pekka Soininen | 2003-06-17 |
| 6562140 | Apparatus for fabrication of thin films | Niklas Bondestam, Janne Kesala, Pekka Soininen | 2003-05-13 |