Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7833352 | Apparatus for fabrication of thin films | Janne Kesala, Leif Keto, Pekka Soininen | 2010-11-16 |
| 7374941 | Active reactant vapor pulse monitoring in a chemical reactor | Menso Hendriks | 2008-05-20 |
| 6939579 | ALD reactor and method with controlled wall temperature | Sven Lindfors | 2005-09-06 |
| 6779378 | Method of monitoring evaporation rate of source material in a container | — | 2004-08-24 |
| 6630030 | Method and apparatus for growing thin films | Tuomo Suntola, Pekka Soininen | 2003-10-07 |
| 6579374 | Apparatus for fabrication of thin films | Janne Kesala, Leif Keto, Pekka Soininen | 2003-06-17 |
| 6562140 | Apparatus for fabrication of thin films | Janne Kesala, Leif Keto, Pekka Soininen | 2003-05-13 |