Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2025-08-12 |
| 11326254 | Protecting an interior of a gas container with an ALD coating | Väino Sammelselg, Juhana Kostamo, Willi Bayerl, Jaan Aarik, Lauri Aarik +2 more | 2022-05-10 |
| RE48871 | Method and apparatus for depositing thin films on a surface | Pekka Soininen | 2022-01-04 |
| 10494718 | Deposition reactor with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2019-12-03 |
| 10041169 | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor | — | 2018-08-07 |
| 10011904 | Atomic layer deposition apparatus and loading methods | Juha A. Kustaa-Adolf Poutiainen | 2018-07-03 |
| 9868131 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2018-01-16 |
| 9095869 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2015-08-04 |
| 8753716 | Method of depositing material using a deposition reactor | Pekka Soininen | 2014-06-17 |
| 8741062 | Apparatus and methods for deposition reactors | Pekka Soininen | 2014-06-03 |
| 8507039 | Method for growing thin films | Tuomo Suntola | 2013-08-13 |
| 8282334 | Atomic layer deposition apparatus and loading methods | Juha A. Kustaa-Adolf Poutiainen | 2012-10-09 |
| 8211235 | Apparatuses and methods for deposition of material on surfaces | Juha A. Kustaa-Adolf Poutiainen | 2012-07-03 |
| 7799300 | Method and apparatus for removing substances from gases | Jaako Hyvarinen | 2010-09-21 |
| 7601223 | Showerhead assembly and ALD methods | Pekka Soininen | 2009-10-13 |
| 7537662 | Method and apparatus for depositing thin films on a surface | Pekka Soininen | 2009-05-26 |
| 7498059 | Method for growing thin films | Tuomo Suntola | 2009-03-03 |
| 7404984 | Method for growing thin films | Tuomo Suntola | 2008-07-29 |
| 7105054 | Method and apparatus of growing a thin film onto a substrate | — | 2006-09-12 |
| 7060132 | Method and apparatus of growing a thin film | Ivo Raaijmakers | 2006-06-13 |
| 7037372 | Method of growing a thin film onto a substrate | Pekka Soininen | 2006-05-02 |
| 7018478 | Method of growing a thin film onto a substrate | Pekka Soininen | 2006-03-28 |
| 6939579 | ALD reactor and method with controlled wall temperature | Niklas Bondestam | 2005-09-06 |
| 6889864 | Source chemical container assembly | Jan von Zweygbergk, Marko J. Kukkonen | 2005-05-10 |
| 6881263 | Method of growing a thin film onto a substrate | Pekka Soininen | 2005-04-19 |