Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Wei Li, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2025-08-12 |
| 12325915 | Substrate processing apparatus and method | Timo Vähä-Ojala, Niklas HOLM, Timo Malinen | 2025-06-10 |
| 12300523 | Substrate processing apparatus and method | — | 2025-05-13 |
| 12247288 | Substrate processing apparatus and method | Tom E. Blomberg | 2025-03-11 |
| 12112927 | Substrate processing apparatus and method | — | 2024-10-08 |
| 12110588 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Timo Malinen, Marko PUDAS | 2024-10-08 |
| 11505864 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Timo Malinen, Marko PUDAS | 2022-11-22 |
| 11414758 | Sample protection | Juhana Kostamo, Riina RITASALO | 2022-08-16 |
| 11280001 | Substrate loading in an ALD reactor | Juhana Kostamo, Wei Li | 2022-03-22 |
| 11004707 | Substrate processing apparatus and method | — | 2021-05-11 |
| 10494718 | Deposition reactor with plasma source | Wei Li, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2019-12-03 |
| 10161038 | Substrate loading in an ALD reactor | Juhana Kostamo, Wei Li | 2018-12-25 |
| 9868131 | Atomic layer deposition with plasma source | Wei Li, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2018-01-16 |
| 9745661 | Method and apparatus for forming a substrate web track in an atomic layer deposition reactor | Timo Malinen | 2017-08-29 |
| 9095869 | Atomic layer deposition with plasma source | Wei Li, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2015-08-04 |
| 6835416 | Apparatus for growing thin films | — | 2004-12-28 |
| 6689210 | Apparatus for growing thin films | Pekka Soininen | 2004-02-10 |
| 6551406 | Apparatus for growing thin films | — | 2003-04-22 |
| 6447607 | Apparatus for growing thin films | Pekka Soininen | 2002-09-10 |
| 4621379 | Flushing operating means for vacuum toilet | — | 1986-11-11 |