| 12383923 |
Atomic layer deposition with plasma source |
Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors |
2025-08-12 |
| 12325915 |
Substrate processing apparatus and method |
Timo Vähä-Ojala, Vaino Kilpi, Niklas HOLM |
2025-06-10 |
| 12297535 |
Substrate processing methods and apparatus |
Juhana Kostamo, Marko PUDAS |
2025-05-13 |
| 12110588 |
Adjustable fluid inlet assembly for a substrate processing apparatus and method |
Vaino Kilpi, Marko PUDAS |
2024-10-08 |
| 11970774 |
Method of operating a deposition or cleaning apparatus |
— |
2024-04-30 |
| 11725279 |
Deposition or cleaning apparatus with movable structure |
— |
2023-08-15 |
| 11505864 |
Adjustable fluid inlet assembly for a substrate processing apparatus and method |
Vaino Kilpi, Marko PUDAS |
2022-11-22 |
| 10619241 |
ALD method and apparatus |
Juhana Kostamo, Wei Li, Tero Pilvi |
2020-04-14 |
| 10597778 |
ALD method and apparatus including a photon source |
— |
2020-03-24 |
| 10494718 |
Deposition reactor with plasma source |
Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors |
2019-12-03 |
| 10329662 |
Protecting an interior of a hollow body with an ALD coating |
Juhana Kostamo, Väino Sammelselg, Jaan Aarik, Lauri Aarik |
2019-06-25 |
| 9869020 |
Protecting a target pump interior with an ALD coating |
Harri Vähämäki |
2018-01-16 |
| 9868131 |
Atomic layer deposition with plasma source |
Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors |
2018-01-16 |
| 9745661 |
Method and apparatus for forming a substrate web track in an atomic layer deposition reactor |
Vaino Kilpi |
2017-08-29 |
| 9095869 |
Atomic layer deposition with plasma source |
Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors |
2015-08-04 |
| 7464436 |
Central vacuum cleaner and its central unit |
— |
2008-12-16 |