Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325915 | Substrate processing apparatus and method | Vaino Kilpi, Niklas HOLM, Timo Malinen | 2025-06-10 |
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Tom E. Blomberg, Marko PUDAS | 2021-04-20 |