Issued Patents All Time
Showing 25 most recent of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359315 | Deposition of oxides and nitrides | Henri Jussila, Chiyu Zhu, Qi Xie, Jiyeon Kim | 2025-07-15 |
| 12354872 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2025-07-08 |
| 12320012 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2025-05-27 |
| 12247288 | Substrate processing apparatus and method | Vaino Kilpi | 2025-03-11 |
| 12241156 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2025-03-04 |
| 12237182 | Showerhead device for semiconductor processing system | Varun Sharma | 2025-02-25 |
| 12148609 | Silicon oxide deposition method | Varun Sharma, Daniele Chiappe, Eva Tois, Viraj Madhiwala, Marko Tuominen +2 more | 2024-11-19 |
| 12146218 | Precursor container | — | 2024-11-19 |
| 12094686 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2024-09-17 |
| 11956977 | Atomic layer deposition of III-V compounds to form V-NAND devices | Varun Sharma, Jan Willem Maes | 2024-04-09 |
| 11948813 | Showerhead device for semiconductor processing system | Varun Sharma | 2024-04-02 |
| 11873558 | Precursor container | — | 2024-01-16 |
| 11823976 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2023-11-21 |
| 11739428 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-08-29 |
| 11739427 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-08-29 |
| 11658030 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2023-05-23 |
| 11640899 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-05-02 |
| 11549177 | Process for passivating dielectric films | Eva Tois, Robert Huggare, Jan Willem Maes, Vladimir Machkaoutsan, Dieter Pierreux | 2023-01-10 |
| 11450591 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2022-09-20 |
| 11437249 | Showerhead device for semiconductor processing system | Varun Sharma | 2022-09-06 |
| 11365478 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2022-06-21 |
| 11362222 | Photoactive devices and materials | Hannu Huotari | 2022-06-14 |
| 11230770 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2022-01-25 |
| 11230769 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2022-01-25 |