Issued Patents All Time
Showing 26–50 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183367 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2021-11-23 |
| 11174550 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Raija H. Matero, Elina Färm | 2021-11-16 |
| 11139308 | Atomic layer deposition of III-V compounds to form V-NAND devices | Varun Sharma, Jan Willem Maes | 2021-10-05 |
| 11114283 | Reactor, system including the reactor, and methods of manufacturing and using same | Varun Sharma, Chiyu Zhu | 2021-09-07 |
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Timo Vähä-Ojala, Marko PUDAS | 2021-04-20 |
| 10861986 | Photoactive devices and materials | Hannu Huotari | 2020-12-08 |
| 10699899 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2020-06-30 |
| 10662534 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10662533 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10665425 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10643925 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2020-05-05 |
| 10553440 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Suvi Haukka, Eva Tois | 2020-02-04 |
| 10529563 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2020-01-07 |
| 10513772 | Process for passivating dielectric films | Eva Tois, Robert Huggare, Jan Willem Maes, Vladimir Machkaoutsan, Dieter Pierreux | 2019-12-24 |
| 10428419 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2019-10-01 |
| 10428421 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Raija H. Matero, Elina Färm | 2019-10-01 |
| 10280519 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10283319 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10273584 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-04-30 |
| 10074541 | Deposition of smooth metal nitride films | Jaakko Anttila | 2018-09-11 |
| 10056249 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2018-08-21 |
| 10043880 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Suvi Haukka, Eva Tois | 2018-08-07 |
| 9941425 | Photoactive devices and materials | Hannu Huotari | 2018-04-10 |
| 9816203 | Crystalline strontium titanate and methods of forming the same | — | 2017-11-14 |
| 9790594 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2017-10-17 |