Issued Patents All Time
Showing 1–25 of 123 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406881 | Methods and systems for filling a gap | Elina Färm, Shinya Iwashita, Charles Dezelah, Jan Willem Maes, Timothee Blanquart +5 more | 2025-09-02 |
| 12394634 | Etch process and a processing assembly | Charles Dezelah, Varun Sharma | 2025-08-19 |
| 12322593 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +4 more | 2025-06-03 |
| 12300505 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2025-05-13 |
| 12272593 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2025-04-08 |
| 12272546 | Formation of SiOC thin films | Toshiya Suzuki, Hannu Huotari | 2025-04-08 |
| 12252790 | Gapfill methods and processing assemblies | Tommi Tynell | 2025-03-18 |
| 12211742 | Methods for depositing gap filling fluid | Timothee Blanquart, René Henricus Jozef Vervuurt, Jihee Jeon | 2025-01-28 |
| 12205820 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma | 2025-01-21 |
| 12176243 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2024-12-24 |
| 12138654 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2024-11-12 |
| 12134108 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2024-11-05 |
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Zecheng Liu, Tommi Tynell, Yu Xu, Mikko Ruoho | 2024-10-01 |
| 12104244 | Methods and systems for filling a gap | Charles Dezelah, Timothee Blanquart, René Henricus Jozef Vervuurt | 2024-10-01 |
| 12094769 | Methods for filling a gap and related systems and devices | Zecheng Liu, Jia Yao, René Henricus Jozef Vervuurt | 2024-09-17 |
| 12027365 | Methods for filling a gap and related systems and devices | Zecheng Liu, Sunja Kim, Jia Yao, Ranjit Borude, Bablu Mukherjee +4 more | 2024-07-02 |
| 11996286 | Silicon precursors for silicon nitride deposition | Charles Dezelah, Hideaki Fukuda | 2024-05-28 |
| 11996284 | Formation of SiOCN thin films | Toshiya Suzuki | 2024-05-28 |
| 11990333 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2024-05-21 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2024-05-07 |
| 11830732 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +4 more | 2023-11-28 |
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11804373 | Selective layer formation using deposition and removing | Eva Tois | 2023-10-31 |
| 11798834 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2023-10-24 |
| 11784043 | Formation of SiN thin films | Toshiya Suzuki, Shang Chen, Ryoko Yamada, Dai Ishikawa, Kunitoshi Namba | 2023-10-10 |