Issued Patents All Time
Showing 26–50 of 123 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Marko Tuominen, Sun Ja Kim, Oreste Madia | 2023-10-03 |
| 11728175 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2023-08-15 |
| 11728164 | Selective PEALD of oxide on dielectric | Eva Tois, Suvi Haukka, Toshiya Suzuki, Lingyun Jia, Sun Ja Kim +1 more | 2023-08-15 |
| 11694892 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2023-07-04 |
| 11654454 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2023-05-23 |
| 11643726 | Methods for forming a layer comprising a condensing and a curing step | Marko Tuominen | 2023-05-09 |
| 11615980 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2023-03-28 |
| 11610775 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Steven R. A. Van Aerde, Suvi Haukka +2 more | 2023-03-21 |
| 11587783 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2023-02-21 |
| 11562900 | Formation of SiOC thin films | Toshiya Suzuki, Hannu Huotari | 2023-01-24 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-01-03 |
| 11525184 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +1 more | 2022-12-13 |
| 11501966 | Selective layer formation using deposition and removing | Eva Tois | 2022-11-15 |
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Marko Tuominen, Sun Ja Kim, Oreste Madia, Eva Tois +2 more | 2022-11-15 |
| 11446699 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2022-09-20 |
| 11389824 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2022-07-19 |
| 11387107 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma | 2022-07-12 |
| 11367613 | Deposition of SiN | Shang Chen, Ryoko Yamada, Antti Niskanen | 2022-06-21 |
| 11342216 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2022-05-24 |
| 11289327 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen | 2022-03-29 |
| 11227789 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2022-01-18 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2022-01-04 |
| 11195712 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Seiji Okura, Hidemi Suemori | 2021-12-07 |
| 11170993 | Selective PEALD of oxide on dielectric | Eva Tois, Suvi Haukka, Toshiya Suzuki, Lingyun Jia, Sun Ja Kim +1 more | 2021-11-09 |
| 11158500 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Marko Tuominen, Sun Ja Kim, Oreste Madia | 2021-10-26 |