Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365981 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Mikko Ritala, Markku Leskelä | 2025-07-22 |
| 12209305 | Deposition of transition metal—comprising material | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2025-01-28 |
| 12173402 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2024-12-24 |
| 12104250 | Vapor deposition processes | Anton Vihervaara, Mikko Ritala | 2024-10-01 |
| 12065739 | Vapor deposition processes | Anton Vihervaara, Mikko Ritala | 2024-08-20 |
| 11959171 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2024-04-16 |
| 11952658 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2024-04-09 |
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2023-06-06 |
| 11624112 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Mikko Ritala, Markku Leskelä | 2023-04-11 |
| 11555242 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2023-01-17 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2023-01-03 |
| 11499222 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2022-11-15 |
| 11499227 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Mikko Ritala, Markku Leskelä | 2022-11-15 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2022-11-08 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2022-07-19 |
| 11072622 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2021-07-27 |
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Mikko Ritala, Markku Leskelä | 2021-06-29 |
| 11047046 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Mikko Ritala, Markku Leskelä | 2021-06-29 |
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2021-05-25 |
| 10941487 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2021-03-09 |
| 10731249 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2020-08-04 |
| 10619244 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2020-04-14 |
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2019-07-23 |