Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555242 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2023-01-17 |
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2019-07-09 |
| 9878516 | Metamaterial thin films | Orest J. Glembocki, Sharka M. Prokes, Joshua D. Caldwell, Mikko Ritala, Markku Leskelä +3 more | 2018-01-30 |
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2017-06-13 |
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2016-06-14 |
| 7498272 | Method of depositing rare earth oxide thin films | Matti Putkonen, Mikko Ritala, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2009-03-03 |
| 6858546 | Method of depositing rare earth oxide thin films | Matti Putkonen, Mikko Ritala, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2005-02-22 |