Issued Patents All Time
Showing 1–25 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362171 | Methods and systems for forming a layer comprising aluminum, titanium, and carbon | Lifu Chen, Qi Xie, Charles Dezelah, Petro Deminskyi, Giuseppe Alessio Verni +1 more | 2025-07-15 |
| 12351902 | Methods and systems for delivery of vanadium compounds | Charles Dezelah, Qi Xie, Dieter Pierreux, Bert Jongbloed, Werner Knaepen +1 more | 2025-07-08 |
| 12243747 | Methods of forming structures including vanadium boride and vanadium phosphide layers | Petro Deminskyi, Charles Dezelah, Jiyeon Kim, Giuseppe Alessio Verni, Maart van Druenen +1 more | 2025-03-04 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Timo Asikainen +2 more | 2025-02-25 |
| 12166099 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Michael Eugene Givens | 2024-12-10 |
| 12154785 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori +2 more | 2024-11-26 |
| 12087586 | Method of forming chromium nitride layer and structure including the chromium nitride layer | Qi Xie, Eric James Shero, Charles Dezelah, Giuseppe Alessio Verni | 2024-09-10 |
| 12018365 | Semiconductor processing apparatus and a method for processing a substrate | David Marquardt, Thomas Aswad | 2024-06-25 |
| 12020938 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Ward Johnson | 2024-06-25 |
| 11926895 | Structures including metal carbide material, devices including the structures, and methods of forming same | Michael Eugene Givens, Eric James Shero | 2024-03-12 |
| 11837483 | Wafer handling chamber with moisture reduction | Ward Johnson | 2023-12-05 |
| 11791153 | Deposition of hafnium oxide within a high aspect ratio hole | Jiyeon Kim, Sol Kim, Ying-Shen Kuo, Michael Schmotzer, Eric James Shero +1 more | 2023-10-17 |
| 11695054 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Michael Eugene Givens | 2023-07-04 |
| 11501973 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Mark Olstad, Jose Alexandro Romero, Dong Li, Ward Johnson, Peijun Chen | 2022-11-15 |
| 11473195 | Semiconductor processing apparatus and a method for processing a substrate | David Marquardt, Thomas Aswad | 2022-10-18 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Hidemi Suemori +2 more | 2022-08-30 |
| 11398382 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Ward Johnson | 2022-07-26 |
| 11270899 | Wafer handling chamber with moisture reduction | Ward Johnson | 2022-03-08 |
| 11242598 | Structures including metal carbide material, devices including the structures, and methods of forming same | Michael Eugene Givens, Eric James Shero | 2022-02-08 |
| 11164955 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Michael Eugene Givens | 2021-11-02 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Timo Asikainen +2 more | 2021-10-05 |
| 11056567 | Method of forming a doped metal carbide film on a substrate and related semiconductor device structures | Dong Li, Peng-Fu Hsu, Moataz Bellah Mousa, Ward Johnson, Xichong Chen | 2021-07-06 |
| 10886123 | Methods for forming low temperature semiconductor layers and related semiconductor device structures | Moataz Bellah Mousa, Peng-Fu Hsu | 2021-01-05 |
| 10872771 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Mark Olstad, Jose Alexandro Romero, Dong Li, Ward Johnson, Peijun Chen | 2020-12-22 |
| 10865475 | Deposition of metal borides and silicides | Eric James Shero, Suvi Haukka, Robert Brennan Milligan, Michael Eugene Givens | 2020-12-15 |