Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416081 | Manifolds for uniform vapor deposition | Andrew Michael Yednak, III, Eric James Shero, Herbert Terhorst | 2025-09-16 |
| 12319999 | Refillable large volume solid precursor sublimation vessel | Carl Louis White, Mohith Verghese | 2025-06-03 |
| 12241594 | Constant headspace ampoule | — | 2025-03-04 |
| 12054825 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, Mohith Verghese | 2024-08-06 |
| 12018365 | Semiconductor processing apparatus and a method for processing a substrate | Petri Raisanen, Thomas Aswad | 2024-06-25 |
| 11859281 | Ampoule for a semiconductor manufacturing precursor | Carl Louis White, Mohith Verghese, Jose Alexandro Romero | 2024-01-02 |
| 11834740 | Apparatus, system, and method for generating gas for use in a process chamber | — | 2023-12-05 |
| 11773485 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, Mohith Verghese | 2023-10-03 |
| 11584990 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, Mohith Verghese | 2023-02-21 |
| 11578406 | Ampoule for a semiconductor manufacturing precursor | Carl Louis White, Mohith Verghese, Jose Alexandro Romero | 2023-02-14 |
| 11473195 | Semiconductor processing apparatus and a method for processing a substrate | Petri Raisanen, Thomas Aswad | 2022-10-18 |
| 11377737 | Manifolds for uniform vapor deposition | — | 2022-07-05 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia, John Kevin Shugrue | 2020-12-22 |
| 10858737 | Showerhead assembly and components thereof | Carl Louis White, Eric James Shero, Jereld Lee Winkler | 2020-12-08 |
| 10662527 | Manifolds for uniform vapor deposition | — | 2020-05-26 |
| 9117866 | Apparatus and method for calculating a wafer position in a processing chamber under process conditions | John Kevin Shugrue | 2015-08-25 |
| 7354335 | CMP apparatus and load cup mechanism | Joe Koeth, James J. Crawford, James Ekberg, Antoni F. Jakubiec, Michael Smigel +1 more | 2008-04-08 |
| 7229339 | CMP apparatus and method | John F. Stumpf, Franklin D. Root, Brian Severson, John D. Herb, James J. Crawford +6 more | 2007-06-12 |
| 6796887 | Wear ring assembly | — | 2004-09-28 |
| 6758939 | Laminated wear ring | Wayne Lougher, Stephen C. Schultz | 2004-07-06 |