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Constant headspace ampoule |
— |
2025-03-04 |
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Carl Louis White, Mohith Verghese |
2024-08-06 |
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Semiconductor processing apparatus and a method for processing a substrate |
Petri Raisanen, Thomas Aswad |
2024-06-25 |
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Ampoule for a semiconductor manufacturing precursor |
Carl Louis White, Mohith Verghese, Jose Alexandro Romero |
2024-01-02 |
| 11834740 |
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— |
2023-12-05 |
| 11773485 |
Bottom fed sublimation bed for high saturation efficiency in semiconductor applications |
Carl Louis White, Mohith Verghese |
2023-10-03 |
| 11584990 |
Bottom fed sublimation bed for high saturation efficiency in semiconductor applications |
Carl Louis White, Mohith Verghese |
2023-02-21 |
| 11578406 |
Ampoule for a semiconductor manufacturing precursor |
Carl Louis White, Mohith Verghese, Jose Alexandro Romero |
2023-02-14 |
| 11473195 |
Semiconductor processing apparatus and a method for processing a substrate |
Petri Raisanen, Thomas Aswad |
2022-10-18 |
| 11377737 |
Manifolds for uniform vapor deposition |
— |
2022-07-05 |
| 10872804 |
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Carl Louis White, Kyle Fondurulia, John Kevin Shugrue |
2020-12-22 |
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Showerhead assembly and components thereof |
Carl Louis White, Eric James Shero, Jereld Lee Winkler |
2020-12-08 |
| 10662527 |
Manifolds for uniform vapor deposition |
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2020-05-26 |
| 9117866 |
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John Kevin Shugrue |
2015-08-25 |
| 7354335 |
CMP apparatus and load cup mechanism |
Joe Koeth, James J. Crawford, James Ekberg, Antoni F. Jakubiec, Michael Smigel +1 more |
2008-04-08 |
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CMP apparatus and method |
John F. Stumpf, Franklin D. Root, Brian Severson, John D. Herb, James J. Crawford +6 more |
2007-06-12 |
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Wear ring assembly |
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2004-09-28 |
| 6758939 |
Laminated wear ring |
Wayne Lougher, Stephen C. Schultz |
2004-07-06 |