Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12247286 | Heater assembly including cooling apparatus and method of using same | Carl Louis White, Eric James Shero, Timothy J. Sullivan | 2025-03-11 |
| 12163225 | Temperature-controlled chemical delivery system and reactor system including same | Carl Louis White, Timothy J. Sullivan | 2024-12-10 |
| 11976359 | Gas supply assembly, components thereof, and reactor system including same | Jianqiu Huang, Gejian Zhao | 2024-05-07 |
| 11926894 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Carl Louis White, Herbert Terhorst | 2024-03-12 |
| 11773486 | Solid source sublimator | Eric James Shero, Carl Louis White, Mohith Verghese, Timothy J. Sullivan | 2023-10-03 |
| 11634812 | Solid source sublimator | Eric James Shero, Carl Louis White, Mohith Verghese, Timothy J. Sullivan | 2023-04-25 |
| 11626313 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, John Kevin Shugrue | 2023-04-11 |
| 11624113 | Heating zone separation for reactant evaporation system | Carl Louis White, Eric James Shero | 2023-04-11 |
| 11501956 | Semiconductor reaction chamber showerhead | Carl Louis White, Todd Robert Dunn, Eric James Shero | 2022-11-15 |
| 11377732 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Carl Louis White | 2022-07-05 |
| 10876205 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Carl Louis White | 2020-12-29 |
| 10872803 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, John Kevin Shugrue | 2020-12-22 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, John Kevin Shugrue, David Marquardt | 2020-12-22 |
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Eric James Shero +2 more | 2020-11-10 |
| 10714315 | Semiconductor reaction chamber showerhead | Carl Louis White, Todd Robert Dunn, Eric James Shero | 2020-07-14 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Michael Halpin, Carl Louis White, Todd Robert Dunn +3 more | 2020-06-16 |
| 10468291 | Reaction system for growing a thin film | Mohith Verghese, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2019-11-05 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Eric James Shero +2 more | 2018-02-13 |
| 9593416 | Precursor delivery system | Eric James Shero, Mohith Verghese, Carl Louis White | 2017-03-14 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2016-06-07 |
| 9017481 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Eric James Shero +2 more | 2015-04-28 |
| 8986456 | Precursor delivery system | Eric James Shero, Mohith Verghese, Carl Louis White | 2015-03-24 |
| 8211230 | Reaction system for growing a thin film | Mohith Verghese, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2012-07-03 |
| 8137462 | Precursor delivery system | Eric James Shero, Mohith Verghese, Carl Louis White | 2012-03-20 |
| D614153 | Reactant source vessel | Eric James Shero, Mohith Verghese, Carl Louis White | 2010-04-20 |