Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319999 | Refillable large volume solid precursor sublimation vessel | Carl Louis White, David Marquardt | 2025-06-03 |
| 12234552 | Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus | Todd Robert Dunn, John Kevin Shugrue | 2025-02-25 |
| 12114488 | Enhancing gapfill performance of dram word line | Yong Yang, Kunal Bhatnagar, Srinivas Gandikota, Seshadri Ganguli, Jose Alexandro Romero +3 more | 2024-10-08 |
| 12080558 | Low temperature deposition of pure molybdenum films | Kunal Bhatnagar, Dmitrii Leshchev, Jose Alexandro Romero | 2024-09-03 |
| 12054825 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Carl Louis White, David Marquardt | 2024-08-06 |
| 11926894 | Reactant vaporizer and related systems and methods | Eric James Shero, Carl Louis White, Kyle Fondurulia, Herbert Terhorst | 2024-03-12 |
| 11859281 | Ampoule for a semiconductor manufacturing precursor | Carl Louis White, David Marquardt, Jose Alexandro Romero | 2024-01-02 |
| 11854813 | Low temperature deposition of pure molybenum films | Kunal Bhatnagar, Dmitrii Leshchev, Jose Alexandro Romero | 2023-12-26 |
| 11773485 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Carl Louis White | 2023-10-03 |
| 11773486 | Solid source sublimator | Eric James Shero, Carl Louis White, Kyle Fondurulia, Timothy J. Sullivan | 2023-10-03 |
| 11742189 | Multi-zone reactor, system including the reactor, and method of using the same | Carl Louis White, Eric James Shero, Todd Robert Dunn | 2023-08-29 |
| 11634812 | Solid source sublimator | Eric James Shero, Carl Louis White, Kyle Fondurulia, Timothy J. Sullivan | 2023-04-25 |
| 11629406 | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate | Todd Robert Dunn, John Kevin Shugrue | 2023-04-18 |
| 11584990 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Carl Louis White | 2023-02-21 |
| 11578406 | Ampoule for a semiconductor manufacturing precursor | Carl Louis White, David Marquardt, Jose Alexandro Romero | 2023-02-14 |
| 11377732 | Reactant vaporizer and related systems and methods | Eric James Shero, Carl Louis White, Kyle Fondurulia | 2022-07-05 |
| 11359286 | Quartz crystal microbalance concentration monitor | Jereld Lee Winkler | 2022-06-14 |
| 10875774 | Tritertbutyl aluminum reactants for vapor deposition | Eric James Shero | 2020-12-29 |
| 10876205 | Reactant vaporizer and related systems and methods | Eric James Shero, Carl Louis White, Kyle Fondurulia | 2020-12-29 |
| 10844486 | Semiconductor processing reactor and components thereof | Eric James Shero, Carl Louis White, Herbert Terhorst, Dan Maurice | 2020-11-24 |
| 10556799 | Tritertbutyl aluminum reactants for vapor deposition | Eric James Shero | 2020-02-11 |
| 10529542 | Cross-flow reactor and method | Carl Louis White, Eric James Shero | 2020-01-07 |
| 10480072 | Semiconductor processing reactor and components thereof | Eric James Shero, Carl Louis White, Herbert Terhorst, Dan Maurice | 2019-11-19 |
| 10468291 | Reaction system for growing a thin film | Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2019-11-05 |
| 10358599 | Selective etching of reactor surfaces | Srini Raghavan, Eric James Shero | 2019-07-23 |