Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276355 | Multi-zone reactor, system including the reactor, and method of using the same | Carl Louis White, Eric James Shero, Todd Robert Dunn | 2019-04-30 |
| 10118828 | Tritertbutyl aluminum reactants for vapor deposition | Eric James Shero | 2018-11-06 |
| 9873942 | Methods of vapor deposition with multiple vapor sources | Christophe Pomarede, Eric James Shero, Jan Willem Maes, Chang-Gong Wang | 2018-01-23 |
| 9593416 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Carl Louis White | 2017-03-14 |
| 9481937 | Selective etching of reactor surfaces | Srini Raghavan, Eric James Shero | 2016-11-01 |
| 9394608 | Semiconductor processing reactor and components thereof | Eric James Shero, Carl Louis White, Herbert Terhorst, Dan Maurice | 2016-07-19 |
| 9359672 | Reaction system for growing a thin film | Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2016-06-07 |
| 9238865 | Multiple vapor sources for vapor deposition | Christophe Pomarede, Eric James Shero, Jan Willem Maes, Chang-Gong Wang | 2016-01-19 |
| 9177784 | Semiconductor device dielectric interface layer | Petri Raisanen, Michael Givens | 2015-11-03 |
| 9117773 | High concentration water pulses for atomic layer deposition | Eric James Shero, Jan Willem Maes | 2015-08-25 |
| 8986456 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Carl Louis White | 2015-03-24 |
| 8784563 | Gas mixer and manifold assembly for ALD reactor | Ryan Michael Schmidt | 2014-07-22 |
| 8728832 | Semiconductor device dielectric interface layer | Petri Raisanen, Michael Givens | 2014-05-20 |
| 8465801 | Gas mixer and manifold assembly for ALD reactor | Ryan Michael Schmidt | 2013-06-18 |
| 8309173 | System for controlling the sublimation of reactants | Marko Tuominen, Eric James Shero | 2012-11-13 |
| 8293658 | Reactive site deactivation against vapor deposition | Eric James Shero, Anthony Muscat, Shawn Miller | 2012-10-23 |
| 8211230 | Reaction system for growing a thin film | Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2012-07-03 |
| 8152922 | Gas mixer and manifold assembly for ALD reactor | Ryan Michael Schmidt | 2012-04-10 |
| 8137462 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Carl Louis White | 2012-03-20 |
| 7914847 | Reactor surface passivation through chemical deactivation | Eric James Shero | 2011-03-29 |
| 7851019 | Method for controlling the sublimation of reactants | Marko Tuominen, Eric James Shero | 2010-12-14 |
| 7799135 | Reactor surface passivation through chemical deactivation | Eric James Shero | 2010-09-21 |
| D614153 | Reactant source vessel | Kyle Fondurulia, Eric James Shero, Carl Louis White | 2010-04-20 |
| 7601225 | System for controlling the sublimation of reactants | Marko Tuominen, Eric James Shero | 2009-10-13 |
| 7118779 | Reactor surface passivation through chemical deactivation | Eric James Shero | 2006-10-10 |