Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9873942 | Methods of vapor deposition with multiple vapor sources | Christophe Pomarede, Eric James Shero, Mohith Verghese, Jan Willem Maes | 2018-01-23 |
| 9238865 | Multiple vapor sources for vapor deposition | Christophe Pomarede, Eric James Shero, Mohith Verghese, Jan Willem Maes | 2016-01-19 |
| 9139906 | Doping with ALD technology | Eric James Shero | 2015-09-22 |
| 8883270 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species | Eric James Shero, Petri Raisanen, Sung Hoon Jung | 2014-11-11 |
| 8877655 | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species | Eric James Shero, Petri Raisanen, Sung Hoon Jung | 2014-11-04 |
| 8563444 | ALD of metal silicate films | Eric James Shero, Glen Wilk | 2013-10-22 |
| 7972977 | ALD of metal silicate films | Eric James Shero, Glen Wilk | 2011-07-05 |
| 7795160 | ALD of metal silicate films | Eric James Shero, Glen Wilk, Jan Willem Maes | 2010-09-14 |