Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Herbert Terhorst, Eric James Shero, Bhushan Zope | 2025-09-02 |
| 12319999 | Refillable large volume solid precursor sublimation vessel | Mohith Verghese, David Marquardt | 2025-06-03 |
| 12276023 | Showerhead assembly for distributing a gas within a reaction chamber | Melvin Verbaas, Jereld Lee Winkler, John Kevin Shugrue | 2025-04-15 |
| 12247286 | Heater assembly including cooling apparatus and method of using same | Eric James Shero, Kyle Fondurulia, Timothy J. Sullivan | 2025-03-11 |
| 12163225 | Temperature-controlled chemical delivery system and reactor system including same | Kyle Fondurulia, Timothy J. Sullivan | 2024-12-10 |
| 12054825 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Mohith Verghese | 2024-08-06 |
| 12033885 | Channeled lift pin | Govindarajasekhar Singu, Dinkar Nandwana, Todd Robert Dunn, Shankar Swaminathan, Bhushan Zope | 2024-07-09 |
| 11946136 | Semiconductor processing device | Jereld Lee Winkler, Eric James Shero, Shankar Swaminathan, Bhushan Zope | 2024-04-02 |
| 11939673 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | John Kevin Shugrue | 2024-03-26 |
| 11926894 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Kyle Fondurulia, Herbert Terhorst | 2024-03-12 |
| 11859281 | Ampoule for a semiconductor manufacturing precursor | Mohith Verghese, David Marquardt, Jose Alexandro Romero | 2024-01-02 |
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Eric James Shero, Todd Robert Dunn, William George Petro, Jereld Lee Winkler +1 more | 2023-11-28 |
| 11773485 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Mohith Verghese | 2023-10-03 |
| 11773486 | Solid source sublimator | Eric James Shero, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-10-03 |
| 11742189 | Multi-zone reactor, system including the reactor, and method of using the same | Mohith Verghese, Eric James Shero, Todd Robert Dunn | 2023-08-29 |
| 11634812 | Solid source sublimator | Eric James Shero, Mohith Verghese, Kyle Fondurulia, Timothy J. Sullivan | 2023-04-25 |
| 11626313 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue | 2023-04-11 |
| 11624113 | Heating zone separation for reactant evaporation system | Eric James Shero, Kyle Fondurulia | 2023-04-11 |
| 11584990 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | David Marquardt, Mohith Verghese | 2023-02-21 |
| 11578406 | Ampoule for a semiconductor manufacturing precursor | Mohith Verghese, David Marquardt, Jose Alexandro Romero | 2023-02-14 |
| 11501956 | Semiconductor reaction chamber showerhead | Todd Robert Dunn, Eric James Shero, Kyle Fondurulia | 2022-11-15 |
| 11492701 | Reactor manifolds | Dinkar Nandwana, Jereld Lee Winkler, Eric James Shero, Todd Robert Dunn | 2022-11-08 |
| 11404302 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Herbert Terhorst, Eric James Shero, Bhushan Zope | 2022-08-02 |
| 11377732 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Kyle Fondurulia | 2022-07-05 |
| 11208722 | Vapor flow control apparatus for atomic layer deposition | Eric James Shero | 2021-12-28 |