Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975470 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | John Kevin Shugrue | 2021-04-13 |
| 10876205 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Kyle Fondurulia | 2020-12-29 |
| 10872803 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue | 2020-12-22 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Kyle Fondurulia, John Kevin Shugrue, David Marquardt | 2020-12-22 |
| 10858737 | Showerhead assembly and components thereof | Eric James Shero, Jereld Lee Winkler, David Marquardt | 2020-12-08 |
| 10844486 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2020-11-24 |
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Dave Marquardt, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2020-11-10 |
| 10714315 | Semiconductor reaction chamber showerhead | Todd Robert Dunn, Eric James Shero, Kyle Fondurulia | 2020-07-14 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Michael Halpin, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10529542 | Cross-flow reactor and method | Eric James Shero, Mohith Verghese | 2020-01-07 |
| 10480072 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2019-11-19 |
| 10468291 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2019-11-05 |
| 10370761 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2019-08-06 |
| 10276355 | Multi-zone reactor, system including the reactor, and method of using the same | Mohith Verghese, Eric James Shero, Todd Robert Dunn | 2019-04-30 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Dave Marquardt, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2018-02-13 |
| 9593416 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Mohith Verghese | 2017-03-14 |
| 9574268 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2017-02-21 |
| 9394608 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2016-07-19 |
| 9388492 | Vapor flow control apparatus for atomic layer deposition | Eric James Shero | 2016-07-12 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2016-06-07 |
| 9340874 | Chamber sealing member | Michael Halpin, Eric James Shero, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |
| 9202727 | Susceptor heater shim | Todd Robert Dunn, Michael Halpin, Eric James Shero, Jerry Winkler | 2015-12-01 |
| 9096931 | Deposition valve assembly and method of heating the same | Andrew Michael Yednak, III, Todd Robert Dunn, Michael Manasco | 2015-08-04 |
| 9017481 | Process feed management for semiconductor substrate processing | Fred Pettinger, Dave Marquardt, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2015-04-28 |
| 9005539 | Chamber sealing member | Michael Halpin, Eric James Shero, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2015-04-14 |