Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8986456 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Mohith Verghese | 2015-03-24 |
| 8216380 | Gap maintenance for opening to process chamber | Eric James Shero, Joe Reed | 2012-07-10 |
| 8211230 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2012-07-03 |
| 8137462 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Mohith Verghese | 2012-03-20 |
| D614153 | Reactant source vessel | Kyle Fondurulia, Eric James Shero, Mohith Verghese | 2010-04-20 |
| 7595271 | Polymer coating for vapor deposition tool | — | 2009-09-29 |
| 7571893 | Valve with high temperature rating | Paul G. Curry | 2009-08-11 |
| 5897380 | Method for isolating a susceptor heating element from a chemical vapor deposition environment | Jon MacErnie, Joseph T. Hillman | 1999-04-27 |
| 5562947 | Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment | Jon MacErnie, Joseph T. Hillman | 1996-10-08 |
| 5370739 | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD | Robert F. Foster, Helen E. Rebenne, Rene E. LeBlanc, Rikhit Arora | 1994-12-06 |
| 5356476 | Semiconductor wafer processing method and apparatus with heat and gas flow control | Robert F. Foster, Helen E. Rebenne, Rene E. LeBlanc, Rikhit Arora | 1994-10-18 |
| 5273588 | Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means | Robert F. Foster, Helen E. Rebenne, Rene E. LeBlanc, Rikhit Arora | 1993-12-28 |