Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6035609 | Ultra high purity gas distribution component with integral valved coupling and methods for its use | Bryce Evans | 2000-03-14 |
| 5924447 | Ultra high purity gas distribution component with integral valved coupling and methods for its use | Bryce Evans | 1999-07-20 |
| 5863023 | Valved coupling for ultra high purtiy gas distribution system | Bryce Evans, Joshua Collins, Russell L. Rogers | 1999-01-26 |
| 5810031 | Ultra high purity gas distribution component with integral valved coupling and methods for its use | Bryce Evans | 1998-09-22 |
| 5664759 | Valved coupling for ultra high purity gas distribution systems | Bryce Evans, Russell L. Rogers, Joshua Collins | 1997-09-09 |
| 5434110 | Methods of chemical vapor deposition (CVD) of tungsten films on patterned wafer substrates | Robert F. Foster | 1995-07-18 |
| 5370739 | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD | Robert F. Foster, Rene E. LeBlanc, Carl Louis White, Rikhit Arora | 1994-12-06 |
| 5356476 | Semiconductor wafer processing method and apparatus with heat and gas flow control | Robert F. Foster, Rene E. LeBlanc, Carl Louis White, Rikhit Arora | 1994-10-18 |
| 5273588 | Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means | Robert F. Foster, Rene E. LeBlanc, Carl Louis White, Rikhit Arora | 1993-12-28 |
| 4957780 | Internal reactor method for chemical vapor deposition | Vinod K. Sarin, Charles D'Angelo, III | 1990-09-18 |
| 4890574 | Internal reactor for chemical vapor deposition | Vinod K. Sarin, Charles D'Angelo, III | 1990-01-02 |