| 6368183 |
Wafer cleaning apparatus and associated wafer processing methods |
Daniel Ray Trojan, Periya Gopalan |
2002-04-09 |
| 6364745 |
Mapping system for semiconductor wafer cassettes |
Jose R. Gonzalez-Martin, Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard +5 more |
2002-04-02 |
| 6350177 |
Combined CMP and wafer cleaning apparatus and associated methods |
Jose R. Gonzalez-Martin, Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard +5 more |
2002-02-26 |
| 6213853 |
Integral machine for polishing, cleaning, rinsing and drying workpieces |
Jose R. Gonzalez-Martin, Chris Karlsrud, Robert F. Allen, Toby Jordan, Craig Howard +5 more |
2001-04-10 |
| 6125861 |
Post-CMP wet-HF cleaning station |
Anand Gupta, Chris Karlsrud, Periya Gopalan, Daniel Ray Trojan, Jeffrey Butler Cunnane |
2000-10-03 |
| 5897380 |
Method for isolating a susceptor heating element from a chemical vapor deposition environment |
Carl Louis White, Joseph T. Hillman |
1999-04-27 |
| 5562947 |
Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment |
Carl Louis White, Joseph T. Hillman |
1996-10-08 |