Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852007 | Robotic method of transferring workpieces to and from workstations | Jose R. Gonzalez-Martin | 2005-02-08 |
| 6520839 | Load and unload station for semiconductor wafers | Jose R. Gonzalez-Martin | 2003-02-18 |
| 6390897 | Cleaning station integral with polishing machine for semiconductor wafers | Jose R. Gonzalez-Martin | 2002-05-21 |
| RE37622 | Wafer polishing method and apparatus | Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi | 2002-04-02 |
| 6364745 | Mapping system for semiconductor wafer cassettes | Jose R. Gonzalez-Martin, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-04-02 |
| 6350177 | Combined CMP and wafer cleaning apparatus and associated methods | Jose R. Gonzalez-Martin, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2002-02-26 |
| 6309279 | Arrangements for wafer polishing | Mike L. Bowman, Gene Hempel, Franklin D. Root | 2001-10-30 |
| 6227946 | Robot assisted method of polishing, cleaning and drying workpieces | Jose R. Gonzalez-Martin | 2001-05-08 |
| 6213853 | Integral machine for polishing, cleaning, rinsing and drying workpieces | Jose R. Gonzalez-Martin, Robert F. Allen, Toby Jordan, Craig Howard, Arthur Hamer +5 more | 2001-04-10 |
| 6125861 | Post-CMP wet-HF cleaning station | Anand Gupta, Periya Gopalan, Daniel Ray Trojan, Jeffrey Butler Cunnane, Jon MacErnie | 2000-10-03 |
| 5989104 | Workpiece carrier with monopiece pressure plate and low gimbal point | Inki Kim, John Natalicio, James Allen Schlueter, Thomas K. Crosby | 1999-11-23 |
| 5975991 | Method and apparatus for processing workpieces with multiple polishing elements | — | 1999-11-02 |
| 5954888 | Post-CMP wet-HF cleaning station | Anand Gupta, Periya Gopalan | 1999-09-21 |
| 5872633 | Methods and apparatus for detecting removal of thin film layers during planarization | Paul Holzapfel, James C. Schlueter, Warren Lin | 1999-02-16 |
| 5834645 | Methods and apparatus for the in-process detection of workpieces with a physical contact probe | Anthony L. Bartels, Bob Allen, Joe Mosca | 1998-11-10 |
| 5791975 | Backing pad | Joseph V. Cesna, Spencer Preston | 1998-08-11 |
| 5791978 | Bearing assembly for wafer planarization carrier | Joseph V. Cesna, Gordon J. Grosslight | 1998-08-11 |
| 5569062 | Polishing pad conditioning | — | 1996-10-29 |
| 5498199 | Wafer polishing method and apparatus | Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi, Spencer Preston | 1996-03-12 |
| 5498196 | Wafer polishing method and apparatus | Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi | 1996-03-12 |
| 5329732 | Wafer polishing method and apparatus | Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi | 1994-07-19 |
| 5274960 | Uniform velocity double sided finishing machine | — | 1994-01-04 |
| 5187901 | Circumferential pattern finishing machine | — | 1993-02-23 |
| 5123218 | Circumferential pattern finishing method | — | 1992-06-23 |