SO

Shigeru Odagiri

SC Speedfam Co.: 3 patents #15 of 105Top 15%
SP Speedfam-Ipec: 1 patents #79 of 143Top 60%
Overall (All Time): #1,271,996 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
RE37622 Wafer polishing method and apparatus Chris Karlsrud, Anthony G. Van Woerkom, Isao Nagahashi 2002-04-02
5498196 Wafer polishing method and apparatus Chris Karlsrud, Anthony G. Van Woerkom, Isao Nagahashi 1996-03-12
5498199 Wafer polishing method and apparatus Chris Karlsrud, Anthony G. Van Woerkom, Isao Nagahashi, Spencer Preston 1996-03-12
5329732 Wafer polishing method and apparatus Chris Karlsrud, Anthony G. Van Woerkom, Isao Nagahashi 1994-07-19