Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE37622 | Wafer polishing method and apparatus | Chris Karlsrud, Anthony G. Van Woerkom, Shigeru Odagiri | 2002-04-02 |
| 6089959 | Polishing method and polishing apparatus | — | 2000-07-18 |
| 5762543 | Polishing apparatus with improved product unloading | Karl Kasprzyk | 1998-06-09 |
| 5645472 | Polishing device | Yoshishige Takahashi | 1997-07-08 |
| 5498199 | Wafer polishing method and apparatus | Chris Karlsrud, Anthony G. Van Woerkom, Shigeru Odagiri, Spencer Preston | 1996-03-12 |
| 5498196 | Wafer polishing method and apparatus | Chris Karlsrud, Anthony G. Van Woerkom, Shigeru Odagiri | 1996-03-12 |
| 5329732 | Wafer polishing method and apparatus | Chris Karlsrud, Anthony G. Van Woerkom, Shigeru Odagiri | 1994-07-19 |
| 5097630 | Specular machining apparatus for peripheral edge portion of wafer | Seiichi Maeda | 1992-03-24 |
| 5094037 | Edge polisher | Shunji Hakomori, Seiichi Maeda | 1992-03-10 |
| 4805348 | Flat lapping machine | Hatsuyuki Arai, Seiichi Maeda, Kazumi Yasuda, Shiro Furusawa, Kazuhiko Hirata +5 more | 1989-02-21 |