Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6840841 | Wafer edge polishing system | — | 2005-01-11 |
| 6773335 | Apparatus for polishing periphery of device wafer and polishing method | — | 2004-08-10 |
| 6478660 | Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped work | Noriaki Mizuno, Hiroshi Nishi | 2002-11-12 |
| 6422930 | Apparatus for removing deposited film | — | 2002-07-23 |
| 6402596 | Single-side polishing method for substrate edge, and apparatus therefor | Toru Asai, Noriaki Mizuno | 2002-06-11 |
| 6290580 | Polishing method for silicon wafers which uses a polishing compound which reduces stains | Hiroaki Tanaka, Akitoshi Yoshida, Yoshihisa Ogawa, Yusuke Inoue | 2001-09-18 |
| 6261160 | Method and apparatus for specular-polishing of work edges | — | 2001-07-17 |
| 6250995 | Apparatus for polishing outer periphery of workpiece | — | 2001-06-26 |
| 6210260 | Carrier and CMP apparatus | Hideo Tanaka, Xu-Jin Wang, Misuo Sugiyama, Kei Tanaka, Makoto Ishida | 2001-04-03 |
| 6196906 | Surface polishing apparatus and method of taking out workpiece | — | 2001-03-06 |
| 6159081 | Method and apparatus for mirror-polishing of workpiece edges | — | 2000-12-12 |
| 6155908 | Work-loading method and surface-grinding apparatus with work position deviation-adjusting mechanism | — | 2000-12-05 |
| 6139408 | Surface grinding machine and carrier used therefor | — | 2000-10-31 |
| 6116997 | Single side work polishing apparatus | Hitoshi NAGAYAMA | 2000-09-12 |
| 6113490 | Work unloading method and surface polishing apparatus with work unloading mechanism | — | 2000-09-05 |
| 6093087 | Wafer processing machine and a processing method thereby | Masahiro Ichikawa, Kenji Amano | 2000-07-25 |
| 5885140 | Single-side abrasion apparatus with dresser | — | 1999-03-23 |
| 5094037 | Edge polisher | Seiichi Maeda, Isao Nagahashi | 1992-03-10 |