Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402596 | Single-side polishing method for substrate edge, and apparatus therefor | Shunji Hakomori, Noriaki Mizuno | 2002-06-11 |
| 6048259 | Wafer loading and unloading mechanism for loading robot | — | 2000-04-11 |