Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6273803 | Carriers and polishing apparatus | Xu-Jin Wang, Shigeto Izumi, Hideo Tanaka | 2001-08-14 |
| 6210260 | Carrier and CMP apparatus | Hideo Tanaka, Xu-Jin Wang, Kei Tanaka, Makoto Ishida, Shunji Hakomori | 2001-04-03 |
| 6159082 | Slurry circulation type surface polishing machine | Xu-Jin Wang, Shinya Iida | 2000-12-12 |
| 6012964 | Carrier and CMP apparatus | Hatsuyuki Arai, Shigeto Izumi, Xu-Jin Wang, Hisato Matsubara, Hideo Tanaka +1 more | 2000-01-11 |
| 5605499 | Flattening method and flattening apparatus of a semiconductor device | Hatsuyuki Arai | 1997-02-25 |
| 5099614 | Flat lapping machine with sizing mechanism | Hatsuyuki Arai | 1992-03-31 |
| 4805348 | Flat lapping machine | Hatsuyuki Arai, Isao Nagahashi, Seiichi Maeda, Kazumi Yasuda, Shiro Furusawa +5 more | 1989-02-21 |