HM

Hisato Matsubara

SC Speedfam Co.: 1 patents #48 of 105Top 50%
📍 Ayase, JP: #223 of 339 inventorsTop 70%
Overall (All Time): #3,604,073 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6012964 Carrier and CMP apparatus Hatsuyuki Arai, Shigeto Izumi, Xu-Jin Wang, Misuo Sugiyama, Hideo Tanaka +1 more 2000-01-11