Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6110026 | Carrier and polishing apparatus | — | 2000-08-29 |
| 6089966 | Surface polishing pad | Xu-Jin Wang | 2000-07-18 |
| 6074277 | Polishing apparatus | — | 2000-06-13 |
| 6068545 | Workpiece surface processing apparatus | — | 2000-05-30 |
| 6066230 | Planarization method, workpiece measuring method, and surface planarization apparatus having a measuring device | — | 2000-05-23 |
| 6040244 | Polishing pad control method and apparatus | Yasushi Ikeyama | 2000-03-21 |
| 6030488 | Chemical and mechanical polishing apparatus | Shigeto Izumi | 2000-02-29 |
| 6012964 | Carrier and CMP apparatus | Shigeto Izumi, Xu-Jin Wang, Misuo Sugiyama, Hisato Matsubara, Hideo Tanaka +1 more | 2000-01-11 |
| 5916009 | Apparatus for applying an urging force to a wafer | Shigeto Izumi | 1999-06-29 |
| 5685766 | Polishing control method | Wayne Mattingly | 1997-11-11 |
| 5605499 | Flattening method and flattening apparatus of a semiconductor device | Misuo Sugiyama | 1997-02-25 |
| 5099614 | Flat lapping machine with sizing mechanism | Misuo Sugiyama | 1992-03-31 |
| 4805348 | Flat lapping machine | Isao Nagahashi, Seiichi Maeda, Kazumi Yasuda, Shiro Furusawa, Kazuhiko Hirata +5 more | 1989-02-21 |
| 4707945 | Upper plate driving system for surface lapping machine | — | 1987-11-24 |