Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6273803 | Carriers and polishing apparatus | Shigeto Izumi, Misuo Sugiyama, Hideo Tanaka | 2001-08-14 |
| 6210260 | Carrier and CMP apparatus | Hideo Tanaka, Misuo Sugiyama, Kei Tanaka, Makoto Ishida, Shunji Hakomori | 2001-04-03 |
| 6159082 | Slurry circulation type surface polishing machine | Misuo Sugiyama, Shinya Iida | 2000-12-12 |
| 6089966 | Surface polishing pad | Hatsuyuki Arai | 2000-07-18 |
| 6012964 | Carrier and CMP apparatus | Hatsuyuki Arai, Shigeto Izumi, Misuo Sugiyama, Hisato Matsubara, Hideo Tanaka +1 more | 2000-01-11 |