Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496748 | Wafer flattening process and storage medium | Michihiko Yanagisawa, Yasuhiro Horiike | 2002-12-17 |
| 6451217 | Wafer etching method | Michihiko Yanagisawa, Chikai Tanaka, Yasuhiro Horiike | 2002-09-17 |
| 6360687 | Wafer flattening system | Michihiko Yanagisawa, Takeshi Sadohara, Chikai Tanaka, Yasuhiro Horiike | 2002-03-26 |
| 6316369 | Corrosion-resistant system and method for a plasma etching apparatus | Michihiko Yanagisawa, Yasuhiro Horiike | 2001-11-13 |
| 6306245 | Plasma etching apparatus | Michihiko Yanagisawa | 2001-10-23 |
| 6280645 | Wafer flattening process and system | Michihiko Yanagisawa, Yasuhiro Horiike | 2001-08-28 |
| 6254718 | Combined CMP and plasma etching wafer flattening system | Chikai Tanaka, Michihiko Yanagisawa, Yasuhiro Horiike | 2001-07-03 |
| 6159388 | Plasma etching method and plasma etching system for carrying out the same | Michihiko Yanagisawa, Yasuhiro Horiike | 2000-12-12 |
| 6159082 | Slurry circulation type surface polishing machine | Misuo Sugiyama, Xu-Jin Wang | 2000-12-12 |
| 6126531 | Slurry recycling system of CMP apparatus and method of same | Akitoshi Yoshida | 2000-10-03 |
| 6106728 | Slurry recycling system and method for CMP apparatus | Akitoshi Yoshida | 2000-08-22 |
| 5980769 | Plasma etching method | Michihiko Yanagisawa | 1999-11-09 |
| 4745088 | Vapor phase growth on semiconductor wafers | Yosuke Inoue, Takaya Suzuki, Masahiro Okamura, Noboru Akiyama, Masato Fujita +1 more | 1988-05-17 |
| 4581101 | Dry-etching process | Makoto Senoue, Kunihiko Terase, Hideo Komatsu | 1986-04-08 |
| 4427515 | Surface acoustic wave device and method for manufacturing the same | Akitsuna Yuhara, Hideo Abe, Kiyoharu Kishimoto, Katashi Hazama | 1984-01-24 |
| 4412119 | Method for dry-etching | Hideo Komatsu, Tatsumi Mizutani, Kazuyoshi Ueki | 1983-10-25 |
| 4352974 | Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching | Tatsumi Mizutani, Norio Kanai, Kunio Harada, Hideo Komatsu | 1982-10-05 |
| 4308089 | Method for preventing corrosion of Al and Al alloys | Kazuyoshi Ueki, Tatsumi Mizutani, Hideo Komatsu, Kado Hirobe | 1981-12-29 |
| 4289188 | Method and apparatus for monitoring etching | Tatsumi Mizutani, Kazuyoshi Ueki, Hideo Komatsu | 1981-09-15 |
| 4267013 | Method for dry-etching aluminum and aluminum alloys | Kazuyoshi Ueki, Hideo Komatsu, Tatsumi Mitzutani | 1981-05-12 |