Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972577 | Chip using method and test chip | Akinori Yokogawa | 2011-07-05 |
| 7691328 | Chip using method and test chip | Akinori Yokogawa | 2010-04-06 |
| 7691369 | Cultured cell construct which contains spheroids of cultured animal cells and the use thereof | Kazunori Kataoka, Hidenori Otsuka, Teruo Okano, Yukio Nagasaki | 2010-04-06 |
| 7678577 | Blood analysis apparatus and blood analysis method | Akio Oki | 2010-03-16 |
| 7582259 | Blood analysis device and blood analysis method | Hiroki Ogawa | 2009-09-01 |
| 7470424 | Cultured cell construct containing spheroids of cultured animal cells and utilization thereof | Kazunori Kataoka, Hidenori Otsuka, Teruo Okano, Yukio Nagasaki | 2008-12-30 |
| 6496748 | Wafer flattening process and storage medium | Michihiko Yanagisawa, Shinya Iida | 2002-12-17 |
| 6461533 | Etchant for silicon oxide and method | Yoshio Ishikawa, Keiji Horioka | 2002-10-08 |
| 6451217 | Wafer etching method | Michihiko Yanagisawa, Chikai Tanaka, Shinya Iida | 2002-09-17 |
| 6360687 | Wafer flattening system | Michihiko Yanagisawa, Takeshi Sadohara, Chikai Tanaka, Shinya Iida | 2002-03-26 |
| 6316369 | Corrosion-resistant system and method for a plasma etching apparatus | Michihiko Yanagisawa, Shinya Iida | 2001-11-13 |
| 6280645 | Wafer flattening process and system | Michihiko Yanagisawa, Shinya Iida | 2001-08-28 |
| 6254718 | Combined CMP and plasma etching wafer flattening system | Chikai Tanaka, Michihiko Yanagisawa, Shinya Iida | 2001-07-03 |
| 6159388 | Plasma etching method and plasma etching system for carrying out the same | Michihiko Yanagisawa, Shinya Iida | 2000-12-12 |
| 6155200 | ECR plasma generator and an ECR system using the generator | Kohei Kawamura | 2000-12-05 |
| 6096176 | Sputtering method and a sputtering apparatus thereof | Takayuki Fukasawa | 2000-08-01 |
| 5997700 | Method of fabricating magnetic head slider | Nobuto Fukushima | 1999-12-07 |
| 5855728 | Method for cleaning vulcanization mold | Shinji Saitoh, Shingo Ohno, Nobuko Kato, Kazuo Naito | 1999-01-05 |
| 5851600 | Plasma process method and apparatus | Yasuo Kobayashi | 1998-12-22 |
| 5487785 | Plasma treatment apparatus | Takayuki Fukasawa | 1996-01-30 |
| 5308791 | Method and apparatus for processing surface of semiconductor layer | Kohei Kawamura | 1994-05-03 |
| 5290609 | Method of forming dielectric film for semiconductor devices | Kohei Kawamura | 1994-03-01 |
| 5185132 | Atomspheric plasma reaction method and apparatus therefor | Satiko Okazaki, Masuhiro Kogoma | 1993-02-09 |
| 5112645 | Phototreating method and apparatus therefor | Makoto Sekine, Haruo Okano | 1992-05-12 |
| 4878995 | Method of dry etching and apparatus for use in such method | Tsunetoshi Arikado, Makoto Sekine, Haruo Okano | 1989-11-07 |