Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7005032 | Wafer table for local dry etching apparatus | Michihiko Yanagisawa, Kazuyuki Tsuruoka | 2006-02-28 |
| 6451217 | Wafer etching method | Michihiko Yanagisawa, Shinya Iida, Yasuhiro Horiike | 2002-09-17 |
| 6360687 | Wafer flattening system | Michihiko Yanagisawa, Takeshi Sadohara, Shinya Iida, Yasuhiro Horiike | 2002-03-26 |
| 6302995 | Local etching apparatus | Michihiko Yanagisawa | 2001-10-16 |
| 6254718 | Combined CMP and plasma etching wafer flattening system | Michihiko Yanagisawa, Shinya Iida, Yasuhiro Horiike | 2001-07-03 |