Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709301 | VUV polarizer, VUV polarization device, VUV polarization method and alignment method | Yohei NAWAKI | 2023-07-25 |
| 9921350 | Grid polarization element, and optical alignment device | — | 2018-03-20 |
| 9798059 | Grid polarizing element | Ryuhei ARAKI | 2017-10-24 |
| 9494296 | Method of manufacturing light emitting element of fluorescent light source forming highly precise photonic structure in fluorescence emitting surface of light emitting element | Daisuke YAJIMA | 2016-11-15 |
| 9354375 | Grid polarizing element and apparatus for emitting polarized UV light | — | 2016-05-31 |
| 7005032 | Wafer table for local dry etching apparatus | Michihiko Yanagisawa, Chikai Tanaka | 2006-02-28 |
| 6908566 | Local dry etching method | Michihiko Yanagisawa | 2005-06-21 |