Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261077 | Work stage and exposure apparatus | Shunta Sugisaki | 2025-03-25 |
| 11709301 | VUV polarizer, VUV polarization device, VUV polarization method and alignment method | Kazuyuki Tsuruoka | 2023-07-25 |
| 10101652 | Exposure method, method of fabricating periodic microstructure, method of fabricating grid polarizing element and exposure apparatus | Daisuke YAJIMA, Kentaro Nomoto | 2018-10-16 |