Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4844774 | Phototreating method and apparatus therefor | Makoto Sekine, Haruo Okano | 1989-07-04 |
| 4838978 | Dry etching apparatus | Makoto Sekine, Haruo Okano, Tsunetoshi Arikado | 1989-06-13 |
| 4786361 | Dry etching process | Makoto Sekine, Haruo Okano | 1988-11-22 |
| 4698238 | Pattern-forming method | Nobuo Hayasaka, Haruo Okano | 1987-10-06 |
| 4668337 | Dry-etching method and apparatus therefor | Makoto Sekine, Haruo Okano | 1987-05-26 |
| 4642171 | Phototreating apparatus | Makoto Sekine, Haruo Okano | 1987-02-10 |
| 4529475 | Dry etching apparatus and method using reactive gases | Haruo Okano, Makoto Sekine | 1985-07-16 |
| 4526643 | Dry etching apparatus using reactive ions | Haruo Okano, Takashi Yamazaki, Hiromichi Horie | 1985-07-02 |
| 4492610 | Dry Etching method and device therefor | Haruo Okano | 1985-01-08 |
| 4431473 | RIE Apparatus utilizing a shielded magnetron to enhance etching | Haruo Okano | 1984-02-14 |
| 4341593 | Plasma etching method for aluminum-based films | Tetuo Kurisaki, Takashi Yamazaki | 1982-07-27 |
| 4277304 | Ion source and ion etching process | Haruo Okano, Masahiro Shibagaki, Katsuo Kadono | 1981-07-07 |
| 4252595 | Etching apparatus using a plasma | Shinichi Yamamoto, Yasusuke Sumitomo, Masahiro Shibagaki | 1981-02-24 |
| 4192706 | Gas-etching device | — | 1980-03-11 |