Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4277304 | Ion source and ion etching process | Yasuhiro Horiike, Haruo Okano, Masahiro Shibagaki | 1981-07-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4277304 | Ion source and ion etching process | Yasuhiro Horiike, Haruo Okano, Masahiro Shibagaki | 1981-07-07 |