Issued Patents All Time
Showing 1–25 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6306756 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Hisashi Kaneko, Nobuo Hayasaka +3 more | 2001-10-23 |
| 6185472 | Semiconductor device manufacturing method, manufacturing apparatus, simulation method and simulator | Shinji Onga, Takako Okada, Hiroshi Tomita, Kikuo Yamabe | 2001-02-06 |
| 6132551 | Inductive RF plasma reactor with overhead coil and conductive laminated RF window beneath the overhead coil | Keiji Horioka | 2000-10-17 |
| 6093243 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 2000-07-25 |
| 6090701 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Hisashi Kaneko, Nobuo Hayasaka +3 more | 2000-07-18 |
| 6066872 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 2000-05-23 |
| 5948205 | Polishing apparatus and method for planarizing layer on a semiconductor wafer | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima | 1999-09-07 |
| 5914275 | Polishing apparatus and method for planarizing layer on a semiconductor wafer | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima | 1999-06-22 |
| 5888338 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1999-03-30 |
| 5879447 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yoshitaka Tsunashima +1 more | 1999-03-09 |
| 5775980 | Polishing method and polishing apparatus | Yasutaka Sasaki, Mie Matsuo, Rempei Nakata, Junichi Wada, Nobuo Hayasaka +1 more | 1998-07-07 |
| 5776557 | Method for forming a film on a substrate by activating a reactive gas | Sadahisa Noguchi, Makoto Sekine | 1998-07-07 |
| 5733713 | Method of manufacturing semiconductor device | Hiroyuki Yano, Tohru Watanabe, Keiji Horioka | 1998-03-31 |
| 5731634 | Semiconductor device having a metal film formed in a groove in an insulating film | Mie Matsuo, Nobuo Hayasaka, Kyoichi Suguro, Hideshi Miyajima, Jun Wada | 1998-03-24 |
| 5707487 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Keiji Horioka | 1998-01-13 |
| 5686151 | Method of forming a metal oxide film | Keitaro Imai, Masahiro Kiyotoshi | 1997-11-11 |
| 5679484 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Toru Watanabe, Katsuya Okumura | 1997-10-21 |
| 5660671 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1997-08-26 |
| 5660744 | Plasma generating apparatus and surface processing apparatus | Makoto Sekine, Keiji Horioka, Katsuya Okumura, Isahiro Hasegawa, Masaki Narita | 1997-08-26 |
| 5661345 | Semiconductor device having a single-crystal metal wiring | Junichi Wada, Hisashi Kaneko, Kyoichi Suguro, Nobuo Hayasaka | 1997-08-26 |
| 5658389 | Thin film forming method and apparatus | Tetsuo Matsuda, Tokuhisa Ohiwa | 1997-08-19 |
| 5654237 | Method of manufacturing semiconductor device | Kyoichi Suguro | 1997-08-05 |
| 5641702 | Method of making semiconductor integrated-circuit capacitor | Keitaro Imai, Tomonori Aoyama, Yasunori Okayama | 1997-06-24 |
| 5641581 | Semiconductor device | Yukio Nishiyama, Rempei Nakata, Nobuo Hayasaka, Riichirou Aoki, Takahito Nagamatsu +3 more | 1997-06-24 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1997-06-17 |