Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347641 | Charged particle beam pattern forming device and charged particle beam apparatus | Tomohiro Saito, Yoshiaki Shimooka | 2025-07-01 |
| 10761051 | Molecular detection apparatus and molecular detection method | Ko Yamada, Hirohisa Miyamoto, Reiko Yoshimura, Mitsuhiro Oki, Yasushi Shinjo +1 more | 2020-09-01 |
| 10677770 | Molecular detection apparatus, molecular detection method, and molecular detector | Ko Yamada, Hirohisa Miyamoto, Reiko Yoshimura, Norikazu OSADA, Mitsuhiro Oki | 2020-06-09 |
| 10527581 | Molecular detection apparatus, molecular detection method, and organic probe | Ko Yamada, Reiko Yoshimura, Hirohisa Miyamoto, Norikazu OSADA, Mitsuhiro Oki | 2020-01-07 |
| 9709523 | Gas detection apparatus | Norikazu OSADA, Hirohisa Miyamoto, Ko Yamada, Mitsuhiro Oki | 2017-07-18 |
| 9291908 | Method of forming pattern and laminate | Atsushi Hieno, Shigeki Hattori, Satoshi Mikoshiba, Koji Asakawa, Masahiro Kanno +2 more | 2016-03-22 |
| 9207531 | Pattern forming method | Koji Asakawa, Shigeki Hattori, Satoshi Tanaka, Toshiya Kotani | 2015-12-08 |
| 9177818 | Pattern formation method and block copolymer | Atsushi Hieno, Koji Asakawa | 2015-11-03 |
| 9073284 | Method of forming pattern and laminate | Atsushi Hieno, Shigeki Hattori, Satoshi Mikoshiba, Koji Asakawa, Masahiro Kanno +2 more | 2015-07-07 |
| 9017930 | Pattern formation method and guide pattern material | Satoshi Mikoshiba, Atsushi Hieno, Shigeki Hattori | 2015-04-28 |
| 8986488 | Pattern formation method and polymer alloy base material | Shigeki Hattori, Koji Asakawa, Ryota Kitagawa, Yuriko Seino, Masahiro Kanno +1 more | 2015-03-24 |
| 8980748 | Substrate polishing method, semiconductor device and fabrication method therefor | Takaaki Kozuki, Takayuki Enomoto, Yuichi Yamamoto | 2015-03-17 |
| 8808973 | Method of forming pattern | Satoshi Mikoshiba, Koji Asakawa, Shigeki Hattori, Atsushi Hieno, Tsukasa Azuma +2 more | 2014-08-19 |
| 8636914 | Method of forming pattern | Satoshi Tanaka, Satoshi Mikoshiba, Atsushi Hieno, Shigeki Hattori | 2014-01-28 |
| 8182981 | Pattern forming method | — | 2012-05-22 |
| 8101516 | Method of forming contact hole pattern in semiconductor integrated circuit device | Toshiya Kotani, Koji Hashimoto | 2012-01-24 |
| 7972932 | Mark forming method and method for manufacturing semiconductor device | Takashi Sato, Masaru Suzuki, Ryoichi Inanami | 2011-07-05 |
| 7816060 | Manufacturing method of semiconductor device, reticle correcting method, and reticle pattern data correcting method | — | 2010-10-19 |
| 7749687 | Pattern forming method used in semiconductor device manufacturing and method of manufacturing semiconductor device | — | 2010-07-06 |
| 7560197 | Mask pattern data producing method, patterning method, reticle correcting method, reticle manufacturing method, and semiconductor apparatus manufacturing method | Toshiya Kotani, Satoshi Tanaka, Shoji Mimotogi | 2009-07-14 |
| 7319944 | Method for a predicting a pattern shape by using an actual measured dissolution rate of a photosensitive resist | Shoji Mimotogi, Yasunobu Onishi | 2008-01-15 |
| 7151953 | Communication apparatus having a light emitting unit that emits light in a variety of colors | Yoji Hamada | 2006-12-19 |
| 7148138 | Method of forming contact hole and method of manufacturing semiconductor device | Shoji Mimotogi, Kazuya Fukuhara, Satoshi Tanaka, Soichi Inoue | 2006-12-12 |
| 7026099 | Pattern forming method and method for manufacturing semiconductor device | Hirokazu Kato, Yasunobu Onishi, Eishi Shiobara, Daisuke Kawamura | 2006-04-11 |
| 7009440 | Pulse signal generator and display device | Masashi Nogawa, Tetsuo Tateishi | 2006-03-07 |