Issued Patents All Time
Showing 1–25 of 186 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424433 | Method for manufacturing metal fluoride-containing organic polymer film, patterning method, and method for manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura, Ryosuke Yamamoto | 2025-09-23 |
| 12353131 | Method for manufacturing indium-containing organic polymer film, patterning method, and method for manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2025-07-08 |
| 12228860 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2025-02-18 |
| 12018107 | Polymer material, composition, and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2024-06-25 |
| 11820840 | Compound, polymer, pattern forming material, and manufacturing method of semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2023-11-21 |
| 11796915 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2023-10-24 |
| 11639402 | Polymer for pattern forming material | Norikatsu Sasao, Shinobu Sugimura | 2023-05-02 |
| 11548208 | Template, method for manufacturing template, and pattern formation method | Shinobu Sugimura | 2023-01-10 |
| 11521855 | Pattern formation method and method of manufacturing semiconductor device | Ryosuke Yamamoto, Ayaka Suko | 2022-12-06 |
| 11410848 | Method of forming pattern, method of manufacturing semiconductor device, and pattern-forming material | Norikatsu Sasao, Shinobu Sugimura | 2022-08-09 |
| 11393671 | Method of forming pattern and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2022-07-19 |
| 11378885 | Pattern formation material and pattern formation method | Naoko Kihara, Seekei Lee, Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura | 2022-07-05 |
| 11320736 | Pattern forming material and pattern forming method | Ryosuke Yamamoto, Seiji Morita, Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura | 2022-05-03 |
| 11192972 | Polymer material, composition, and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2021-12-07 |
| 11192971 | Pattern forming material, composition for pattern formation, pattern forming method and method of manufacturing semiconductor device | Norikatsu Sasao, Shinobu Sugimura | 2021-12-07 |
| 11177129 | Method of manufacturing semiconductor device, method of forming pattern film, and metal-containing organic film | Norikatsu Sasao, Shinobu Sugimura | 2021-11-16 |
| 11167469 | Template, method for manufacturing template, and pattern formation method | Shinobu Sugimura | 2021-11-09 |
| 11161999 | Pattern formation method, block copolymer, and pattern formation material | Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura | 2021-11-02 |
| 10877374 | Pattern formation method and pattern formation material | Seekei Lee, Naoko Kihara, Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura | 2020-12-29 |
| 10672621 | Pattern forming material, pattern forming method, and method for manufacturing semiconductor device | Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura | 2020-06-02 |
| 10553443 | Pattern formation method | Tomoaki Sawabe, Shinobu Sugimura | 2020-02-04 |
| 10534260 | Pattern formation method | Tomoaki Sawabe, Shinobu Sugimura | 2020-01-14 |
| 10141637 | Pattern antenna | — | 2018-11-27 |
| 10032788 | Semiconductor memory device | Shigeki Hattori, Masaya Terai, Hideyuki Nishizawa | 2018-07-24 |
| 9905915 | Pattern antenna | — | 2018-02-27 |