Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424433 | Method for manufacturing metal fluoride-containing organic polymer film, patterning method, and method for manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura, Ryosuke Yamamoto | 2025-09-23 |
| 12353131 | Method for manufacturing indium-containing organic polymer film, patterning method, and method for manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2025-07-08 |
| 12228860 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2025-02-18 |
| 12018107 | Polymer material, composition, and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2024-06-25 |
| 11820840 | Compound, polymer, pattern forming material, and manufacturing method of semiconductor device | Koji Asakawa, Shinobu Sugimura | 2023-11-21 |
| 11796915 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2023-10-24 |
| 11639402 | Polymer for pattern forming material | Koji Asakawa, Shinobu Sugimura | 2023-05-02 |
| 11410848 | Method of forming pattern, method of manufacturing semiconductor device, and pattern-forming material | Koji Asakawa, Shinobu Sugimura | 2022-08-09 |
| 11393671 | Method of forming pattern and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2022-07-19 |
| 11378885 | Pattern formation material and pattern formation method | Koji Asakawa, Naoko Kihara, Seekei Lee, Tomoaki Sawabe, Shinobu Sugimura | 2022-07-05 |
| 11320736 | Pattern forming material and pattern forming method | Ryosuke Yamamoto, Seiji Morita, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura | 2022-05-03 |
| 11192971 | Pattern forming material, composition for pattern formation, pattern forming method and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2021-12-07 |
| 11192972 | Polymer material, composition, and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2021-12-07 |
| 11177129 | Method of manufacturing semiconductor device, method of forming pattern film, and metal-containing organic film | Koji Asakawa, Shinobu Sugimura | 2021-11-16 |
| 11161999 | Pattern formation method, block copolymer, and pattern formation material | Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura | 2021-11-02 |
| 10877374 | Pattern formation method and pattern formation material | Koji Asakawa, Seekei Lee, Naoko Kihara, Tomoaki Sawabe, Shinobu Sugimura | 2020-12-29 |
| 10672621 | Pattern forming material, pattern forming method, and method for manufacturing semiconductor device | Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura | 2020-06-02 |
| 8956560 | Method of manufacturing mold | Yasuaki Ootera, Yoshiyuki Kamata, Naoko Kihara, Yoshiaki Kawamonzen, Takeshi Okino +5 more | 2015-02-17 |
| 8916053 | Pattern forming method | Yoshiaki Kawamonzen, Yasuaki Ootera, Akiko Yuzawa, Naoko Kihara, Yoshiyuki Kamata +5 more | 2014-12-23 |
| 8865010 | Pattern forming method and imprint mold manufacturing method | Naoko Kihara, Hiroyuki Hieda, Akiko Yuzawa, Ryosuke Yamamoto, Yoshiyuki Kamata | 2014-10-21 |
| 7852537 | Optical recording medium and method of manufacturing the same | Akiko Hirao, Kazuki Matsumoto, Rumiko Hayase, Takahiro Kamikawa | 2010-12-14 |
| 7601465 | Holographic recording medium | Rumiko Hayase, Akiko Hirao, Kazuki Matsumoto | 2009-10-13 |