| 12424433 |
Method for manufacturing metal fluoride-containing organic polymer film, patterning method, and method for manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura, Ryosuke Yamamoto |
2025-09-23 |
| 12353131 |
Method for manufacturing indium-containing organic polymer film, patterning method, and method for manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2025-07-08 |
| 12228860 |
Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2025-02-18 |
| 12018107 |
Polymer material, composition, and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2024-06-25 |
| 11820840 |
Compound, polymer, pattern forming material, and manufacturing method of semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2023-11-21 |
| 11796915 |
Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2023-10-24 |
| 11639402 |
Polymer for pattern forming material |
Koji Asakawa, Shinobu Sugimura |
2023-05-02 |
| 11410848 |
Method of forming pattern, method of manufacturing semiconductor device, and pattern-forming material |
Koji Asakawa, Shinobu Sugimura |
2022-08-09 |
| 11393671 |
Method of forming pattern and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2022-07-19 |
| 11378885 |
Pattern formation material and pattern formation method |
Koji Asakawa, Naoko Kihara, Seekei Lee, Tomoaki Sawabe, Shinobu Sugimura |
2022-07-05 |
| 11320736 |
Pattern forming material and pattern forming method |
Ryosuke Yamamoto, Seiji Morita, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura |
2022-05-03 |
| 11192971 |
Pattern forming material, composition for pattern formation, pattern forming method and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2021-12-07 |
| 11192972 |
Polymer material, composition, and method of manufacturing semiconductor device |
Koji Asakawa, Shinobu Sugimura |
2021-12-07 |
| 11177129 |
Method of manufacturing semiconductor device, method of forming pattern film, and metal-containing organic film |
Koji Asakawa, Shinobu Sugimura |
2021-11-16 |
| 11161999 |
Pattern formation method, block copolymer, and pattern formation material |
Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura |
2021-11-02 |
| 10877374 |
Pattern formation method and pattern formation material |
Koji Asakawa, Seekei Lee, Naoko Kihara, Tomoaki Sawabe, Shinobu Sugimura |
2020-12-29 |
| 10672621 |
Pattern forming material, pattern forming method, and method for manufacturing semiconductor device |
Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura |
2020-06-02 |
| 8956560 |
Method of manufacturing mold |
Yasuaki Ootera, Yoshiyuki Kamata, Naoko Kihara, Yoshiaki Kawamonzen, Takeshi Okino +5 more |
2015-02-17 |
| 8916053 |
Pattern forming method |
Yoshiaki Kawamonzen, Yasuaki Ootera, Akiko Yuzawa, Naoko Kihara, Yoshiyuki Kamata +5 more |
2014-12-23 |
| 8865010 |
Pattern forming method and imprint mold manufacturing method |
Naoko Kihara, Hiroyuki Hieda, Akiko Yuzawa, Ryosuke Yamamoto, Yoshiyuki Kamata |
2014-10-21 |
| 7852537 |
Optical recording medium and method of manufacturing the same |
Akiko Hirao, Kazuki Matsumoto, Rumiko Hayase, Takahiro Kamikawa |
2010-12-14 |
| 7601465 |
Holographic recording medium |
Rumiko Hayase, Akiko Hirao, Kazuki Matsumoto |
2009-10-13 |