Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980748 | Substrate polishing method, semiconductor device and fabrication method therefor | Hiroko Nakamura, Takayuki Enomoto, Yuichi Yamamoto | 2015-03-17 |
| 6428389 | Polishing apparatus | Shuzo Sato, Hiizu Ootorii | 2002-08-06 |
| 6280292 | Polishing apparatus | Shuzo Sato, Hiizu Ootorii | 2001-08-28 |