Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950439 | Pattern forming method | — | 2021-03-16 |
| 9797034 | High strength and high toughness cast steel material and method for producing the same | Yoshihiro Gotoh, Shinji Tanaka | 2017-10-24 |
| 9291908 | Method of forming pattern and laminate | Atsushi Hieno, Shigeki Hattori, Hiroko Nakamura, Satoshi Mikoshiba, Koji Asakawa +2 more | 2016-03-22 |
| 9108342 | Method of forming film, method of forming pattern, and method of manufacturing semiconductor device | — | 2015-08-18 |
| 9073284 | Method of forming pattern and laminate | Atsushi Hieno, Shigeki Hattori, Hiroko Nakamura, Satoshi Mikoshiba, Koji Asakawa +2 more | 2015-07-07 |
| 9040123 | Pattern formation method | Ayako Kawanishi | 2015-05-26 |
| 9034121 | Low alloy steel for geothermal power generation turbine rotor, and low alloy material for geothermal power generation turbine rotor and method for manufacturing the same | Satoru Ohsaki, Kazuhiro Miki, Koji Kajikawa, Shigeru Suzuki, Masayuki Yamada +10 more | 2015-05-19 |
| 8999078 | Forging heat resistant steel, manufacturing method thereof, forged parts and manufacturing method thereof | Masayuki Yamada, Reki Takaku, Haruki Ohnishi, Kenichi Okuno, Kenichi Imai +2 more | 2015-04-07 |
| 8980755 | Method of pattern formation | Ayako Kawanishi | 2015-03-17 |
| 8808973 | Method of forming pattern | Satoshi Mikoshiba, Koji Asakawa, Hiroko Nakamura, Shigeki Hattori, Atsushi Hieno +2 more | 2014-08-19 |
| 8609014 | Template manufacturing method, semiconductor device manufacturing method and template | Tatsuhiko Higashiki, Kyoichi Suguro | 2013-12-17 |
| 8512488 | Ni—Fe based forging superalloy excellent in high-temperature strength and high-temperature ductility, method of manufacturing the same, and steam turbine rotor | Shinya Imano, Hirotsugu Kawanaka, Hiroyuki Doi, Tatsuya Takahashi, Koji Kajikawa | 2013-08-20 |
| 8119313 | Method for manufacturing semiconductor device | Katsutoshi Kobayashi, Daizo Muto, Koutarou Sho | 2012-02-21 |
| 7820098 | High Cr ferritic heat resistance steel | Masahiko Morinaga, Yoshinori Murata, Kazuhiro Miki, Tohru Ishiguro, Ryokichi Hashizume | 2010-10-26 |
| 6846750 | High precision pattern forming method of manufacturing a semiconductor device | Tokuhisa Ohiwa, Shoji Seta, Nobuo Hayasaka, Katsuya Okumura, Akihiro Kojima +3 more | 2005-01-25 |
| 6576375 | Photomask | Seiro Miyoshi, Hideyuki Kanemitsu | 2003-06-10 |
| 6279502 | Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device | — | 2001-08-28 |
| 6096484 | Pattern forming method using chemically amplified resist and apparatus for treating chemically amplified resist | — | 2000-08-01 |
| 6051369 | Lithography process using one or more anti-reflective coating films and fabrication process using the lithography process | Takashi Sato | 2000-04-18 |
| 5998100 | Fabrication process using a multi-layer antireflective layer | Tokuhisa Ohiwa, Tetsuo Matsuda, David M. Dobuzinsky, Katsuya Okumura | 1999-12-07 |
| 5879853 | Top antireflective coating material and its process for DUV and VUV lithography systems | — | 1999-03-09 |
| 5879863 | Pattern forming method | Masaki Narita, Katsuya Okumura | 1999-03-09 |
| 5866303 | Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device | — | 1999-02-02 |
| 5815247 | Avoidance of pattern shortening by using off axis illumination with dipole and polarizing apertures | Bernhard Poschenrieder, Takashi Sato | 1998-09-29 |
| 5759746 | Fabrication process using a thin resist | Tokuhisa Ohiwa, Tetsuo Matsuda, David M. Dobuzinsky, Katsuya Okumura | 1998-06-02 |