Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068915 | Manufacturing method for a semiconductor device including resist films different in thickness | Satoshi Nagai, Eiji Yoneda, Kentaro Matsunaga | 2018-09-04 |
| 9972547 | Measurement method, manufacturing method of device, and measurement system | — | 2018-05-15 |
| 8119313 | Method for manufacturing semiconductor device | Katsutoshi Kobayashi, Daizo Muto, Tsukasa Azuma | 2012-02-21 |
| 7683291 | Substrate processing method and manufacturing method of semiconductor device | Kei Hayasaki, Tsuyoshi Shibata, Shinichi Ito | 2010-03-23 |
| 7662542 | Pattern forming method and semiconductor device manufacturing method | Eishi Shiobara, Takehiro Kondoh, Yuji Kobayashi | 2010-02-16 |
| 6162745 | Film forming method | Shinichi Ito, Katsuya Okumura | 2000-12-19 |